Home / Our Books /  Engineering Books < EC Branch / MEMS and Nano Technology

More Books related to same category

Engineering Mechanics

Rs. 300

Information System Security

Rs. 275

Software Project Management

Rs. 180

Operations Research

Rs. 275

Digital Image Processing

Rs. 100

MEMS and Nano Technology

By Swati Gaur

10 Ratings | 2 Reviews

Rs. 180


Specifications of MEMS and Nano Technology

Book Details

  • 978-93-83733-98-9
  • -
  • 2016
  • Paper Back
  • -


  • Syllabus - MEMS and Nanotechnology



    Unit 1.


    Introduction to Nanoelectronics: Top Down and Bottom UP Approach, Nanotechnology Potentials, Idea of band structure – Metals, Insulators and Semiconductors. Effect of crystal size on density of states and band gap, Electronic structure of nanoparticles. Nanostructured crystals, Size and dimensionality effects – Single electron tunneling – Applications – Superconductivity, Graphenes and CNT.


    Unit 2.


    Nano Fabrication and Patterning Techniques: Si processing methods, Cleaning/etching, Oxidation, Gettering, doping, Epitaxy. CVD & MOCVD, Physical Vapor Deposition (PVD), Liquid Phase Techniques, Self assembly and catalysis. Etching: Wet and Dry, Nanolithography, Nanoimprinting, XRay Lithography(XRL), Particle beam lithography(e-beam, FIB, shadow mask evaporation),

    Unit 3.


    General Characterization Techniques: X- Ray Diffraction studies – Bragg’s law – particle size – Scherrer’s equation, Infrared Spectroscopy of Semiconductors, Raman Spectroscopy, Dynamic Light Scattering (DLS), NMR Spectroscopy, ESR Spectroscopy. photo electron spectroscopy(XPS)- SEM,TEM,STM, Atomic force microscopy(AFM).


    Unit 4.


    Electrical, Magnetic, Mechanical and Optical Properties and Applications: Electronic and electrical properties -One dimensional systems-Metallic nanowires, Quantum dots -Two dimensional systems - Quantum wells. Magnetic properties -Transport in a magnetic field. Mechanical properties, Optical properties, Evolving interfaces of Nano in NanoBiology, Nano Sensors and Nanomedicines


    Unit 5.


    MEMS and Microsystems: Evolution of Micro Fabrication – Micro Systems and Microelectronics. Application of MEMS in Various Fields. Introduction – Substrate and Wafer, Active Substrate Material. Silicon as a substrate material, MEMS packaging. Case study on pressure sensor with packaging.

Reviews of MEMS and Nano Technology

  • 5
    Average Rating Based on 10 ratings
  • 4
  • 0
  • 0
  • 0
  • 0

Nirnal Narayan

12 Feb 2016

Best Book

Nice book and comprehensive text. Examples are interesting and enhances the knowldeg of real worl implementation


15 Feb 2016

Good Quality book

I gained a lot from this book. The latest performance parameters are well elaborated with experimental data.

See All >